Crucial Issues in Semiconductor Materials and Processing Technologies [Paperback]

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.
*Defect Aspects of Advanced Device Technologies.- Field Effect Analysis in Low Voltage Operation a-Si:H Thin Film Transistors with Very Thin PECVD a-SiO2 Gate Dielectric.- *Silicon and Silicon: Germanium Alloy Growth; Means and Applications.- *Preparation and Characterization of Silicon Ribbons.- Rapid Thermal Chemical Vapor Deposition of Six Ge1-x Alloys on Si and SiO2 and New Applications of Six Ge1-x Alloys in Advanced MOSFET Processes.- *Kinetics and Dynamics of MBE Growth.- Effects of Near-Interface Defects on the Optical Properties of MBE Grown GaAs/AlGaAs Layers.- *Optoelectric Materials.- Electrical Characteristics of PECVD Silicon Nitride/Compound Semiconductor Interfaces for Optoelectronic Device Passivation.- *Fundamentals of Semiconductor Processing.- Optical Analysis of Oxygen in Epitaxial Silicon.- Electrical Properties of Clean and Fe-Decorated Stacking Faults in p-type Si.- On the Dirty Contacts on n-type Silicon.- M?ssbauer Study of the DX-Center in Te-Implanted Alx Ga1-x As.- *Surface Science and SemiconlS„