Into The Nano Era: Moore's Law Beyond Planar Silicon CMOS [Hardcover]

Even as we enter the nanotechnology era, we are now encountering the 50th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will Moore^TMs Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues by a re-examination of the scientific and technological foundations of the micro-electronics era. By better assessing and understanding the past five decades of this era, it is proposed that a firmer foundation can be laid for the research that will ensue and possibly provide a glimpse of what is next to come in the nanotechnology era.

Historical Background.- Silicon: Child and Progenitor of Revolution.- The Economic Implications of Moores Law.- State-of-the-Art.- Using Silicon to Understand Silicon.- Theory of Defects in Si: Past, Present, and Challenges.- Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices.- Surface and Interface Chemistry for Gate Stacks on Silicon.- Enhanced Carrier Mobility for Improved CMOS Performance.- Transistor Scaling to the Limit.- Future Directions.- Beyond CMOS Electronics: Self-Assembled Nanostructures.- Hybrid CMOS/Molecular Integrated Circuits.- Sublithographic Architecture: Shifting the Responsibility for Perfection.- Quantum Computing.- Afterwords.- Nano-Whatever: Do We Really Know Where We Are Heading?.- Silicon Forever! Really?.

As we enter the nanotechnology era, we are also encountering the 50^th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will Moore^TMs Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues through a re-examination of the scientific and technological foundations of the microelectronics era. It is proposed that, by better assessing and understandilƒ|