Microwave Discharges: Fundamentals and Applications [Hardcover]

Surface Wave Discharges.- The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives.- Wave Propagation in Bounded Plasmas.- Microwave Discharges: Structures and Stability.- Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides.- Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure.- Strongly Damped Surface Waves in Plasmas.- Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field.- Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves.- Microwave Plasma Sources.- Surface-Wave Plasma Sources.- Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas.- ECR Plasma Sources.- Distributed ECR: Concept, Performances and Perspectives.- Large Area Planar Microwave Plasmas.- Fabry-Perot-Type-Microwave Resonator.- Diagnostics.- Diagnostics of Microwave Discharges.- Thermal Discharges: Experiments and Diagnostics.- Optical Diagnostics in Radiofrequency Glow and Afterglow.- Optical Diagnostics for High Electron Density Plasmas.- Use of Emissive Probes in HF Plasmas.- Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas.- Modeling.- Kinetic Modeling of Microwave Discharges.- Collision Dominated Electron Kinetics in Low and High Frequency Fields.- Power Deposition in Low Pressure Capacitively Coupled RF Discharges.- Time Dependent Electron Energy Distribution Functions in Molecular Gases.- Excitation Equilibria in Plasmas; A Classification.- Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries.- Light Sources.- Applications of Microwave Discharges toHigh-Power Light Sources.- Applications.- Semiconductor Processing Applications of Microwave Plasmas.- Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas.- Production of Active Species ils0