The book is concerned with the theory, background, and practical use of transmission electron microscopes with lens correctors that can correct the effects of spherical aberration. The book also covers a comparison with aberration correction in the TEM and applications of analytical aberration corrected STEM in materials science and biology. This book is essential for microscopists involved in nanoscale and materials microanalysis especially those using scanning transmission electron microscopy, and related analytical techniques such as electron diffraction x-ray spectrometry (EDXS) and electron energy loss spectroscopy (EELS).
List of Contributors xi Preface xiii
1 General Introduction to Transmission Electron Microscopy (TEM) 1
Peter Goodhew
1.1 What TEM Offers 1
1.2 Electron Scattering 3
1.2.1 Elastic Scattering 7
1.2.2 Inelastic Scattering 8
1.3 Signals which could be Collected 10
1.4 Image Computing 12
1.4.1 Image Processing 12
1.4.2 Image Simulation 13
1.5 Requirements of a Specimen 14
1.6 STEM Versus CTEM 17
1.7 Two Dimensional and Three Dimensional Information 17
2 Introduction to Electron Optics 21
Gordon Tatlock
2.1 Revision of Microscopy with Visible Light and Electrons 21
2.2 Fresnel and Fraunhofer Diffraction 22
2.3 Image Resolution 23
2.4 Electron Lenses 25
2.4.1 Electron Trajectories 26
2.4.2 Aberrations 27
2.5 Electron Sources 30
2.6 Probe Forming Optics and Apertures 32
2.7 SEM, TEM and STEM 33&l£¦