Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting [Paperback]

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.Introduction.-?Micro/nano Integrated Fabrication Technique for Silicon.-?Micro/Nano Integrated Fabrication Technique for Flexible Materials.-?Flexible Triboelectric Nanogenerators: Principle and Fabrication.-?Flexible Triboelectric Nanogenerators: Enhancement and Applications.-?Summary and Perspectives.Dr. Zhang Xiao-Sheng is currently working as a postdoctoral researcher at ?cole Polytechnique F?d?rale de Lausanne (EPFL),
Switzerland, and as a visiting researcher at the University of Tokyo. His research interests mainly include three areas:
(1) micro/nano integrated fabrication technology;
(2) micro/nano energy technology;
(3) smart drug delivery system.

HONORS & AWARDS
2014 Excellent Doctoral Dissertation of Peking University
2014 Outstanding Graduation Student of Peking University
2014 Outstanding Graduation Student of Beijing City
2013 National Scholarship for Outstanding Graduate Students
2013 Academic Top 10 Graduate Student, Peking University
2013 Innovation Award, Peking University
2013 Academic Top 10 Graduate Student, Schl“