Secondary Ion Mass Spectrometry SIMS III: Proceedings of the Third International Conference, Technical University, Budapest, Hungary, August 30Septem [Paperback]

Following the biannual meetings in MUnster (1977) and Stanford (1979) the Third International Conference on Secondary Ion Mass Spectroscopy was held in Budapest from August 31 to September 5, 1981. The Conference was attended by about 250 participants. The success of the 1981 Conference in Budapest was especially due to the excellent preparation and organization by the Local Organizing Committee. We would also like to acknowledge the generous hospitality and cooperation of the Hungarian Academy of Sciences. Japan was chosen to be the location for the next conference in 1983. SIMS conferences are devoted to two main issues: improving the application of SIMS in different and especially new fields, and understanding the ion formation process. Needless to say, there is a very strong interaction be? tween these two issues. The major reason for the rapid increase in SIMS activities in the last few years is the fact that SIMS is a powerful tool for bulk, thin-film, and surface analysis. Today it is extensively and successfully applied in such different fields as depth profiling and imaging of semiconductor devices, in isotope analysis of minerals, in imaging biological tissues, in the study of catalysts and catalytic reactions, in oxide-layer analysis on metals in drug detection, and in the analysis of body fluids.I. Instrumentation.- Instrumental Aspects of Spatially 3-Dimensional SIMS Analysis.- Some Problems of Construction Implied by Requirements of Up-To-Date SIMS Instrumentation.- Description and Applications of a New Design Cs+ Ion Source on the COALA Ion Microprobe for Negative Ion SIMS.- Operational Data of a Simple Microfocus Gun Using an EHD-Type Indium Ion Source.- First Results on a Scanning Ion Microprobe Equipped with an EHD-Type Indium Primary Ion Source.- Simple Double-Channel SIMS Instrument.- Principles and Applications of a Dual Primary Ion Source and Mass Filter for an Ion Microanalyser.- A Quadrupole Mass Spectrometer with Energy Filtering for SIMS StlÓ-