Sensor Technology 2001: Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 1415 May, 2001 [Paperback]

Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection.- Electro-Osmotic Flow Control in Microfluidics Systems.- Flow Sensing Using the Temperature Distribution along a Heated Microbeam.- Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller.- Technology for Spatial Light Modulators Based on Reflective Silicon Structures.- Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor.- High Speed Integrated Cmos Wavefront Sensor.- Automotive Sensor Development: Success Guaranteed?.- Study On The Behaviour of Various Si Substrate Geometries for Use as Passive Heat Sink.- Transfer Mould Packaging For Sensors.- Inexpensive Mems Packaging.- Low-Cost System to Determine the X-Y Position in a Resistive Touch-Screen.- High Capacity Silicon Load Cells.- Thermopile Design For A Cmos Wind-Sensor.- Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon And Porous Silicon Carbide.- Limitations And Complementary Value Of Cryogenic Sf6-O2 And Bosch Plasma Etch Process For Silicon Micromachining.- Fabrication Of Mechanical Structures Using Macro-Porous Silicon.- Fine Tuning The Surface Roughness of Powder Blasted Glass Surfaces.- On the Feasibility of Using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors.- Amperometric Sensor for Detection of Redox Activity.- Accurate Quantitative Measurement of E-Field Distributions in SOLID Phantoms Using A Flexible Schottky Diode Sheet.- A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump.- HF Etching of Si-Oxides and Si-Nitrides for SurfaceMicromachining.- A Light Absorption Cell for ?-Tas With Koh/Ipa Etched 45? Mirrors in Silicon.- A Low-Cost And Accurate Conductance-Measurement System.- An Improved Sensor-Actuator System for Dynamic Surface Tensiolã)