ESSDERC 89 19th European Solid State Device Research Conference, Berlin [Paperback]

The conference ESSDERC '89 held in September 1989 in Berlin was concerned with the physics, electrical characteristics, reliability and processing of solid state devices and electronic materials. The proceedings contain all invited and contributed papers of the conference and thus becomes a state-of-the-art-report of solid state device research in Europe 1989.The conference ESSDERC '89 held in September 1989 in Berlin was concerned with the physics, electrical characteristics, reliability and processing of solid state devices and electronic materials. The proceedings contain all invited and contributed papers of the conference and thus becomes a state-of-the-art-report of solid state device research in Europe 1989.GaAs electronic devices.- Deep submicron dry etching.- Characterization of hot carrier trapping in the gate oxide of MOSFETs.- The use of boron doped polysilicon in PMOS devices.- Semiconductor device fabrication with high energy ion implantation.- A self-aligned gate definition process with sub-micron gaps.- Novel submicron processes for shallow p+-n junctions.- Enhanced process window for BPSG flow in a salicide process using an LPCVD nitride cap layer.- Silicon oxidation rate dependence on dopant pile-up.- Beryllium and manganese diffusion in Ga0.47In0.53As during MBE-growth.- Quality and applications of In(Ga)AIAs-layers.- On the high-frequency behaviour of ohmic contacts.- Assessment of semi-insulating InP:Fe layers for substrate applications.- Investigation on p-buried GaAs MESFETs.- An InGaAs/GaAs strained superlattice MSM photodiode for fast light detection at 1.3?m.- Scaling-down of submicrometer GaAs MESFETs.- The mobility model in MINIMOS.- MESFET analysis with MINIMOS.- Numerical analysis of breakdown in silicon diodes.- A new algorithm to accelerate convergence in the simulation of semiconductor devices.- Narrow-width effects in submicron MOS ICs.- Simulation of parasitic currents and other effects in narrlÔ