Unconventional Nanopatterning Techniques and Applications [Hardcover]

Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive. As a result, a number of simple and unconventional methods have been introduced, beginning first with research demonstrations in the mid 1990s. This book focuses on these unconventional patterning techniques and their applications to optics, organic devices, electronic devices, biological devices, and fluidics.

PREFACE xv

I NANOPATTERNING TECHNIQUES 1

1 INTRODUCTION 3

2 MATERIALS 7

2.1 Introduction 7

2.2 Mold Materials and Mold Preparation 8

2.2.1 Soft Molds 8

2.2.2 Hard Molds 19

2.2.3 Rigiflex Molds 19

2.3 Surface Treatment and Modification 21

References 23

3 PATTERNING BASED ON NATURAL FORCE 27

3.1 Introduction 27

3.2 Capillary Force 28

3.2.1 Open-Ended Capillary 29

3.2.2 Closed Permeable Capillary 31

3.2.3 Completely Closed Capillary 40

3.2.4 Fast Patterning 43

3.2.5 Capillary Kinetics 45

3.3 London Force and Liquid Filament Stability 48

3.3.1 Patterning by Selective Dewetting 49

3.3.2 Liquid Filament Stability: Filling and Patterning 51

3.4 Mechanical Stress: Patterning of A Metal Surface 56

References 63

4 PATTERNING BASED ON WORK OF ADHESION 67

4.1 Introduction 67

4.2 Work of Adhesion 68

4.3 Kinetic Effects 71

4.4 Transfer Patterning 74

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