The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.
MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.
Introduction.- Reliability /Weibull, bathtub curve, basics (What is reliability?).- Failure Modes and Physics of Failure (POF).- Strategies for identifying root cause (FMEA).- Manufacturing Processes & Procedures.- Testing & Qualification Processes & Procedures.- Improving Reliability: Techniques and Tools.- Design for Reliability (DFR).
Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS reliability because of specific high volume manufacturing experience generally view the details of a reliability program as a competitive advantage and are reluctant to share it. MEMS Reliability focuses on the reliability and manufacturability of MEMS at a fundamental product engineering level by addressing process development and characterization, material property characterization, fal³2
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