Micro and Nano Fabrication Tools and Processes [Paperback]

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.

The book is clearly written and easy to read. Thevarious topics are balanced and well organized. & The numerous figures andschematics are the most useful tools of the book. & It is useful to studentsand newcomers, but also experts may find it a good reference because there aresome useful aspects not easily found in other books & . the book offers a goodopportunity to go through the basic semiconductor fabrication technologies. (RosariaA. Puglisi, MRSBulletin, Vol. 40, October, 2015)

Provide an excellent summary and explanation for nearly every micro and nano fabrication subject that readers could possibly be interested in learning about. & this work is useful as an instructional aid with comprehension questions at the end of each chapter, as well as a chapter that contains a start-to-finish example of device fabrication. & Summing Up: Recommended. Lower- and upper-division undergraduates, graduate students, and two-year technical program students. (N. M. Fahrenkopf, Choice, Vol. 52 (12), August, 2015)

Hans Gatzen received a PhD equivalent in Mechanical Engineering from the RWTH Aachen in Aachen, Germany, li