Microsystems and Nanotechnology [Hardcover]

Microsystems and Nanotechnology presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts  the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects  and is a valuable reference for students, teachers and engineers working with the involved technologies.

Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Including the contributions of key researchers from around the world, this five-part book explores everything from the fundamentals of microsystems and nanotechnology to issues surrounding their application and the future potential of this exciting field.

Part 1.The Fundamentals of Microsystems and Nanotechnology.-?

Information Electronics Of Nano-era.- Micro/Nano Fluidics.- Materials? Problems in MEMS.- Nanomechanics in Crossed Multidiscipline.- Nano Structure and Monomolecular Electronic Transport Feature.- Nanomaterials structural Analysis and Attribute.-

Part 2.Microsystems.-

MEMS Introduction.- Micro Electromechanical Sensor.- Microactuator.- MEMS Design.- MEMS Processing and Fabrication Techniques and Technology.- Optical MEMS and Nano-Photonics.- Introduction of MEMS Packaging.-