Nanoscale Spectroscopy and Its Applications to Semiconductor Research [Paperback]

Fabrication technologies for nanostructured devices have been developed recently, and the electrical and optical properties of such nanostructures are a subject of advanced research.
This book describes the different approaches to spectroscopic microscopy, i.e., Electron Beam Probe Spectroscopy, Spectroscopic Photoelectron Microscopy, and Scanning Probe Spectroscopy. It will be useful as a compact source of reference for the experienced reseracher, taking into account at the same time the needs of postgraduate students and nonspecialist researchers by using a tutorial approach throughout.Fabrication technologies for nanostructured devices have been developed recently, and the electrical and optical properties of such nanostructures are a subject of advanced research.
This book describes the different approaches to spectroscopic microscopy, i.e., Electron Beam Probe Spectroscopy, Spectroscopic Photoelectron Microscopy, and Scanning Probe Spectroscopy. It will be useful as a compact source of reference for the experienced reseracher, taking into account at the same time the needs of postgraduate students and nonspecialist researchers by using a tutorial approach throughout.Spectro-microscopy by TEM-SEM.- Determination of Nanosize Particle Distribution by Low Frequency Raman Scattering: Comparison to Electron Microscopy.- Development of Cathodoluminescence (CL) for Semiconductor Research, Part I: TEM-CL Study of Microstructures and Defects in Semiconductor Epilayers.- Development of CL for Semiconductor Research, Part II: Cathodoluminescence Study of Semiconductor Nanoparticles and Nanostructures Using Low-Electron-Beam Energies.- Development of CL for Semiconductor Research, Part III: Study of Degradation Mechanisms in Compound Semiconductor-Based Devices by SEM-CL.- Microcharacterization of Conformal GaAs on Si Layers by Spatially Resolved Optical Techniques.- Strain Analysis in Submicron Electron Devices by Convergent Beam Electron Diffraction.- Syl#