Optical Characterization of Thin Solid Films [Hardcover]

This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.

Introduction and modelling activities.- Optical film characterization topics: An overview.- Universal dispersion model for characterization of optical thin films over wide spectral range.- Predicting optical properties of oxides from ab initio calculations.- Spectrophotometry and spectral ellipsometry.- Optical characterization of thin films by means of spectroscopic imaging spectrophotometry.- Data processing methods for imaging spectrophotometry.- In-situ and ex-situ spectrophotometry in thin film characterization.- Ellipsometric characterization of thin solid films.- Characterization of defective and corrugated coatings.- Optical characterization of thin films exhibiting defects.- Scanning probe microscopy characterization of optical thin films.- Resonant grating waveguide structures.- Absorption and scatter.- Roughness and scatter in optical coatings.- Absorption and fluorescence measurements in optical coatings.- Cavity ring-down technique for optical coating characterization.

Olaf Stenzel finished his diploma thesis in laser spectroscopy at the physics department of Moscow State University, Russia, in 1986. He received his PhD from Chemnitz University of Technology, Germany, in 1990 and habilitated there in 1999 in the field of optical properties of heterogeneous optical coatings. From 2001, he has worked at the Optical Coating Department of Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena, Germany. There he worked for several lÛ