Piezoresistor Design and Applications [Paperback]

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.? Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The? text concludes with an up-to-date discussion of the need for integrated MEMS? design and opportunities to leverage new materials, processes and MEMS technology.?

Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

This book details how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. It features a case study approach that includes the design of uniaxial piezoresistors and pressure sensors.Introduction.- Piezoresistance fundamentals.- Sensitivity, noise and resolution.- Fabrication and process modeling.- Temperature effects.- Design optimization.- Alternative materials and transduction methods.- Appendix? A Glossary of mathematical symbols.- Appendix B Ion implantation lookup tables.- Appendix C Code.

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators.

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