Polymer Films in Sensor Applications [Paperback]

Polymer films now play an essential and growing role in sensors. Recent advances in polymer science and film preparation have made polymer films useful, practical and economical in a wide range of sensor designs and applications. Further, the continuing miniaturization of microelectronics favors the use of polymer thin films in sensors.
This new book is the first comprehensive presentation of this technology. It covers both scientific fundamentals and practical engineering aspects. Included is an extensive survey of all types of sensors and applications. The very detailed table of contents in the next pages provides full information on content. More than 200 schematics illustrate a wide variety of sensor structures and their function.Foreword, Preface
Introduction
Sensors and Their Characteristics
Polymers and Their Properties



Sensor Technologies
Monolithic Semiconductor Processing: Silicon Single Crystal, Epitaxial Growth, Structuring Silicon, Lithography and Etching, Anisotropic Etching, Doping Techniques, Integrated Processing
Processing of Ceramics and Glasses: Microstructure of Ceramics, Manufacturing of Ceramics, Microstructure and Behaviour of Glasses, Manufacturing of Glasses
Thin- and Thick-Film Technologies: Thin-Film Processing, Thick-Film Processing, Polymer Thick-Film Technology
Processing of Microsensor Polymer Films: Processing of Photosensitive Polymers, Photolithography of Nonphotosensitive Polymers, Printing of Polymers, Electrochemical Polymerization, Vacuum-Deposited Polymer Films, Other Polymer Film Technologies
References and Supplementary Reading

Sensor Structures with Sensitive Polymers
Impedance-Type Sensors
Semiconductor-Based Sensors: Field Effect Principle, Other Semiconductor Sensors
Resonant Sensors: BAW Sensors, SAW Sensors, Other Resonator-Type Sensors
Electrochemical Cells: Potentiometric Sensors, Amperol3°